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VIEW Precis 200 VIEW 200

東莞市天測光學設備有限公司

會員指數：

企業認證：

價格：電議

所在地：廣東東莞市

型號：VIEW Precis 200

更新時間：2024-09-05

瀏覽次數：1149

公司地址：中國廣東，重慶，昆山，上海，深圳，香港

13603074946 張人雷(先生) 總經理

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產品簡介

美國VIEW Precis 200影像測量儀一款應用于晶圓、掩膜版、MEMs和HDD正面的高測量系統。該款Precis結合了工作臺、可靠的顯微光學系統和可選的三款的測量軟件套裝，具備為過程測量提供新水平的能力。

公司簡介

東莞市天測光學設備有限公司（TianCe Optical Equipment Co.,LTD.）是一家專業從事測量儀器銷售和服務的高新技術企業。公司坐落在中國制造業名城廣東省東莞市.公司本著“誠信、專業、務實、創新”的經營理念，堅持“以質量求生存、以信譽求發展”為企業宗旨,為客戶提供高質低價的產品和服務,獲得珠三角客戶廣泛好評。
公司專業從事美國QVI產品、OGP影像測量儀，VIEW影像測量儀（中國區總代）、法國Keron 關節臂三坐標測量儀、等著名品牌測量儀器的銷售、安裝、維修、校正、保養、升級等服務。公司擁有完善的樣品測試中心和方案評估實驗室,可為客戶提供完善的測量解決方案,公司附設200平米的機器展示中心,可為企業，學校及研究機構提供三維尺寸測量，三維激光掃描，測量儀應用培訓等服務。

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產品說明

美國VIEW Precis 200影像測量儀

美國VIEW Precis 200影像測量儀是一款應用于晶圓、掩膜版、MEMs和HDD正面的高測量系統。該款Precis結合了工作臺、可靠的顯微光學系統和可選的三款的測量軟件套裝，具備為過程測量提供新水平的能力。
美國VIEW Precis 200影像測量儀在視野內實現了亞微米級測量，點間距測量精度可達0.65μm
雙閉環伺服馬達控制保證、平穩的移動
符合人體工程學的緊湊設計
獨有的微焦點技術保證、可重復聚焦的的運動

測量軟件:
IEW Metrology Software (VMS)
選配： Elements 測量軟件
選配： Measure-X 測量軟件

選配軟件模塊:
? 區域多聚焦
? SmartProfile® 3D GD&T 評測軟件
? 的圖像濾波，圖像拼接，用戶自定義界面
? VMS 離線工作站軟件
? 數字 IO

美國VIEW Precis 200影像測量儀特征

	標配	選配
X,Y,Z行程(mm)	200 x 200 x 5	200 x 200 x 100
XY載物臺	Hand crafted, precision lapped compound stage
Z軸	Micro Focus Block? microflexure focus assembly	擴展Z軸運動，空氣軸承運動和線性馬達驅動
X,Y,Z刻度分辨率	0.01μm
載物臺驅動	X,Y軸連桿驅動直流伺服；Z軸旋轉直流伺服
zui大推薦負載	12 kg
成像光學	Olympus顯微鏡光學系統, 包含臥式明暗場照明器，五孔電動物鏡轉盤，帶目鏡傾斜三目觀察筒和標準攝像機接口
前透鏡（可現場更換）	10明場物鏡 50長工作距離明場物鏡	5X明場物鏡或明暗場物鏡 10明場物鏡或明暗場物鏡 20長工作距離明場物鏡或明暗場物鏡 50長工作距離明場物鏡或明暗場物鏡 100長工作距離明場物鏡或明暗場物鏡
測量相機	140萬像素 (1392 x 1040), 1/2-inch, 數碼, 黑白攝像機	200萬像素(1628 x 1236), 數碼,黑白攝像機
照明裝置	全光譜、可調節鹵鎢同軸表面光	帶N.A.調節綠色LED透射光
傳感器選項		Integrated photo spectrometer for photoresist and thin film thickness measurements
操作系統	四核處理器， Windows ® 7 操作系統，集成網絡和通信端口
控制器配件包	3軸操作桿控制手動載物臺, 帶急停按鈕和開始按鈕	單LCD 平板顯示器, 鍵盤和鼠標雙LCD 平板顯示器, 鍵盤和鼠標
電源供應	115/230 VAC, 50/60 Hz, 1-Phase, 700W
額定環境	溫度: 20°C ± 0.2°C 相對濕度: 30% - 80% 振動: ISO VC-B	振動: 使用150物鏡時ISO VC-C
X,Y線性精度1,2,3,4	E1: (0.25+2L/1000) μm
Z軸線性精度1,2,5	E1: (0.25) μm (使用100物鏡)
說明：所有參數均是在20°C恒溫環境下得到	1.zui大溫度變化率: 1° C/小時；2. zui大垂直溫度梯度: 1° C/m 3. 在勻速狀態下均勻分布載荷5KG 4. XY區域accuracy artifact:在標準測量平面QVI網格分劃板或者QVI線條刻度。定義25mm工作臺表面為標準測量平面。 5. Z軸 accuracy artifact: QVI step gage, interferometer or master gage blocks

Precis的應用范圍包括：
半導體/電子
PCB板與Stencil
光罩
引線框，引線接合，柔性線路板，連接器
SMT元件貼裝
錫膏/環氧數脂膠點
芯片載體和托盒
噴墨打印機墨盒

數據存儲
磁盤介質基板
滑塊和懸臂組(HGA)
Wafer carriers and row bar pallets

注塑和機加工件
模具和刀具
醫療設備
燃料噴射部件
手表組件

VIEW Precis® 200
The VIEW Precis 200 from QVI® is a high accuracy micro-metrology system for wafers, masks, MEMs, and HDD heads. The Precis combines precision stages, proven microscope optics, and a choice of three world-class metrology software packages to provide new levels of capability for process metrology.

The VIEW Precis delivers sub-micron field-of-view and point-to-point measurement accuracy on features as small as 0.65 μm.

Dual Loop Servo Motion Control for precise and stable part translation

Ergonomic control station and compact footprint

Exclusive Mirco Focus Block provides rigid, repeatable focus motion

Metrology Software:
VIEW Metrology Software (VMS)
? Optional: Elements® metrology software
? Optional: Measure-X® metrology software

Available Optional Software Modules:
Area Multi-Focus
? MeasureFit® Plus
? SmartProfile® 3D GD&T evaluation software
? Advanced image filtering, image stitching custom UI
? VMS Off-Line Workstation Software
? Digital IO

Featuring:

	Standard	Optional
X,Y,Z Travel (mm)	200 x 200 x 5	200 x 200 x 100
XY Stage	Hand crafted, precision lapped compound stage
Z Stage	Micro Focus Block? microflexure focus assembly	Extended Z-axis motion with precision air bearing motion and linear motor drive
X,Y,Z Scale Resolution	0.01 μm
Stage Drive System	Rod drive DC servo X,Y motion, and rotary DC servo Z-axis motion
Max Recommended Load	12 kg
Imaging Optics	Microscope optics, including horizontal bright field/dark field illuminator, five-objective motorized lens turret, and camera back tube
Front Lens (Field Interchangeable)	10 Bright Field 50 Long Working Distance, Bright Field	5X Bright Field or Bright Field/Dark Field 10 Bright Field or Bright Field/Dark Field 20 Long Working Distance, Bright Field or Bright Field/Dark Field 50 Long Working Distance, Bright Field or Bright Field/Dark Field 100 Long Working Distance, Bright Field or Bright Field/Dark Field
Metrology Camera	1.4 megapixel (1392 x 1040), 1/2-inch, digital, monochrome	2.0 megapixel (1628 x 1236), digital monochrome
Illumination	Full spectrum tungsten halogen coaxial surface light	Green LED transmitted light with auto N.A. stop
Sensor Options		Integrated photo spectrometer for photoresist and thin film thickness measurements
System Controller	® Quad core processor, Windows 7 Operating System and on-board networking and communication ports
Controller Accessory Package	3-axis joystick for manual stage control, with E-stop and start buttons.	Single LCD flat panel display, computer keyboard and mouse Dual LCD flat panel displays, computer keyboard and mouse
Power Requirements	115/230 VAC, 50/60 Hz, 1-Phase, 700W
Rated Environment	Temperature: 20°C ± 0.2°C Relative Humidity: 30% - 80% Vibration: ISO VC-B	Vibration: ISO VC-C for use of 150 objective lens
1,2,3,4 X,Y Linear Accuracy	E1: (0.25+2L/1000) μm
1,2 Z Linear Accuracy	E1: (0.25) μm (with use of a 100 lens)
Notes:All specifications apply to a thermally stable machine and a certified artifact.	1. Maximum rate of temperature change: 0.5° C/Hour \| 2. Maximum vertical temperature gradient: 1° C/Meter 3. At rated velocity with evenly distributed load of 5KG ® 4. X,Y linear accuracy artifact: QVI grid reticle (low expansion material) or QVI linescale in the standard measuring plane. Standard measuring plane is defined as within 25 mm of the worktable surface

applications for Precis include:
Semiconductor/Electronics
PCBs and Stencils
Photo masks
Lead frames, wire bonds, flex circuits, connectors
SMT component placement
Solder paste/Epoxy glue dot
Chip carriers and trays
Inkjet printer cartridges

Data Storage
Suspensions
Slider and Head Gimble Assemblies (HGA)
Disk Media substrates

Precision plastic molded and machined parts
Dies and tooling
Medical devices
Fuel injection components
Watch components

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